PLASMA

Science & Engineering

• Generation of plasma in gas, water and vacuum
• Plasma channels for transport of beams and plasma reactors
• Plasma cathode for generation of high current electron beams
• Ozone generators
• Gas sparks
• Systems for deposition of films and coatings
• Real-time systems for diagnostics of plasma on the basis of LabVIEW

Technologies

• Modification of materials: semiconductors, polymers, metal and etc.
• Cleaning of surfaces
• Deposition of films and coatings
• Decontamination, sterilization, destruction
• Plasma chemistry